MICRO-530: NanotechnologyThis course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices.
MICRO-331: Microfabrication technologiesThe student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexibl
MICRO-373: Advanced microfabrication practicalsThis TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small
MICRO-501: MEMS practicals IObjective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class
