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David Oezer

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Related publications (3)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

TaSiN nanocomposite thin films: Correlation between structure, chemical composition, and physical properties

Rosendo Sanjines, David Oezer

The structural and electronic properties of fcc-TaN/SiNx nanocomposite thin films deposited by reactive magnetron sputtering have been investigated as function of the N and Si contents. Our studies have been mainly focused on three different types of nanoc ...

Elsevier Science Sa2014

Electrical and optical properties of Ta-Si-N thin films deposited by reactive magnetron sputtering

Rosendo Sanjines, David Oezer

The electrical and optical properties of TaxSiyNz thin films deposited by reactive magnetron sputtering from individual Ta and Si targets were studied in order to investigate the effects of nitrogen and silicon contents on both properties and their correla ...

Amer Inst Physics2012

Influence of bias voltage on the microstructure and physical properties of magnetron sputtered Zr–Si–N nanocomposite thin films

Rosendo Sanjines, Silviu Cosmin Sandu, David Oezer

e report an investigation concerning the influence of ion bombardment on the nanostructure and physical properties of Zr–Si–N nanocomposite thin films. The films were deposited by reactive magnetron sputtering from individual Zr and Si targets. The Si cont ...

2009