Reymond Clavel, Florent Cosandier
We present a compact 3 degrees of freedom (dof) (X-Y-θz) absolute position sensor offering a sub-micrometric resolution. The travelling range is 15x15mm2 (translations) and ±180° (rotation), with an absolute precision better than 10μm over the whole travel ...
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2009