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A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and ob ...
After microelectromechanical systems (MEMS) devices have been well established, components of higher complexity are now developed. Particularly, the combination with optical components has been very successful and have led to optical MEMS. The technology o ...
We demonstrate high resolution imaging with microfabricated, cantilevered probes, consisting of solid quartz tips on silicon levers. The tips are covered by a 60-nm thick layer of aluminium, which appears to be closed at the apex when investigated by trans ...
We present a hybrid probe for scanning near-field optical microscopy (SNOM), which consists of a micromachined photoplastic tip with a metallic aperture at the apex that is attached to an optical fiber, thus combining the advantages of optical fiber probes ...
Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization prope ...
The results of round-robin measurements of waveguide loss and integrated mirror reflectivity in several European laboratories in the frame of the COST 240 project are presented. The Fabry-Perot cavity contrast method was used on semiconductor optical waveg ...
The objective of this work is to fabricate a scanning probe sensor that combines the well-established method for atomic force microscopy, employing a micro-machined Si cantilever and integrated tip, with a probe for the optical near field. A photosensitive ...