Reymond Clavel, Jean-Marc Breguet, Johann Michler, Dongfeng Zhang
Two types of electrostatically actuated tensile stages for in situ electron microscopy mechanical testing of 1-D nanostructures were designed, microfabricated, and tested. Testing was carried out for mechanical characterization of silicon nanowires (SiNWs) ...
Institute of Electrical and Electronics Engineers2010