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Boris Legradic

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Related publications (3)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Plasma deposition in an ideal showerhead reactor: a two-dimensional analytical solution

Christoph Hollenstein, Alan Howling, Boris Legradic, Michaël Chesaux

The interplay of gas flow and depletion by plasma dissociation determines the spatial distribution of species and the deposition uniformity in a plasma source. Many plasma reactors use a gas showerhead and the design of the flow dynamics is a critical aspe ...

2012

Radio frequency breakdown between structured parallel plate electrodes with a millimetric gap in low pressure gases

Christoph Hollenstein, Alan Howling, Boris Legradic

This paper presents an investigation into radio frequency (rf) breakdown for electrodes with holes or protrusions, approximating the situation in real reactors and providing a benchmark for fluid simulations. rf breakdown curves (voltage versus pressure) g ...

American Institute of Physics2010

Arcing in Very Large Area Plasma-Enhanced Chemical Vapour Deposition Reactors

This thesis presents an investigation into arcing and parasitic plasmas in large area plasma enhanced chemical vapour deposition reactors. Two types were investigated: RF breakdown in millimetric gaps in absence of plasma (e.g. dark space shielding), in a ...

EPFL2011