Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos
Photostructurable epoxy based resists, like SU-8, are soft materials with a Young’s Modulus around 4 GPa, which makes them particularly suitable as base material to fabricate Atomic Force Microscopy (AFM) probes for non-destructive analysis of fragile samp ...
Elsevier2009