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Toralf Scharf

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Toralf Scharf

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High-resolution interference microscopy with spectral resolution for the characterization of individual particles and self-assembled meta-atoms

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography

Engineered nanostructures' characterization by spectral interferometric microscopy

Specification of aspherical surfaces used as refractive elements in micro-optical systems

Leveraging wafer-level manufacturing process limitations to increase large scale fused silica microlens array uniformity

Simulation of microoptics under inhomogeneous illumination: Sinusoidal Phase Grating under Gaussian Beam Illumination

Are Photonic Nanojets Achromatic?

High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching

Using effective medium theories to design tailored nanocomposite materials for optical systems

High power modular LED-based illumination system for lithography applications