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Izzet Yildiz

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Related publications (2)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Monolithic Integration of Silicon Nanowires With a Microgripper

Michail Zervas, Yusuf Leblebici, Mustafa Yilmaz, Özgür Özsun, Izzet Yildiz

Si nanowire (NW) stacks are fabricated by utilizing the scalloping effect of inductively coupled plasma deep reactive ion etching. When two etch windows are brought close enough, scallops from both sides will ideally meet along the dividing centerline of t ...

Institute of Electrical and Electronics Engineers2009

Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch applications

Davide Sacchetto, Yusuf Leblebici, Izzet Yildiz

The challenge of wafer-scale integration of silicon nanowires into microsystems is addressed by developing a fabrication approach that utilizes a combination of Bosch-process-based nanowire fabrication with surface micromachining and chemical-mechanical-po ...

Institute of Physics2011