Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko
It is more difficult to nucleate AlN-ScN alloy thin films (AlScN) in pure (0001)-texture than it is with pure AlN thin films. AlN thus can serve as seed layer for AlScN. Equipment limitations may lead to the problem of a vacuum break between AlN and AlScN ...
Ieee2017