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Silica-like nanoparticles are produced from four different organosilicon monomers HMDSO, TMDSO, TEOS and TMOS in a continuous non-equilibrium plasma reactor. The nanoparticle synthesis is studied as a function of the process pressure, plasma power, gas vel ...
RF microelectromechanical systems (MEMS) capacitive switches for two different dielectrics, aluminum nitride (AlN) and silicon nitride (Si3N4), are presented. The switches have been characterized and compared in terms of DC and RF performance (5-40 GHz). S ...
High density (7-10 NW/μm) SiNW arrays of up to 16 nanowires vertically stacked with diameter widths below 20 nm have been successfully fabricated to create highly sensitive 3D FETs for biosensing applications. In order to take advantage of the increased se ...