Hans Peter Herzig, Lubos Hvozdara, Pierre-Yves Baroni, Joab Di Francesco, Antoine Muller
We present an aspheric collimating lens for mid-infrared (4-14 µ) quantum cascade lasers. The lenses were etched into silicon by an inductively coupled plasma reactive ion etching system on wafer level. The high refractive index of silicon reduces the heig ...
2012