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Davide Balma

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Related publications (7)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode

Paul Muralt, Ramin Matloub Aghdam, Robin Nigon, Silviu Cosmin Sandu, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

The use of interdigitated electrodes (IDEs) in conjunction with ferroelectric thin films shows many attractive features for piezoelectric MEMS applications. In this work, growth of {1 0 0}-textured lead zirconate titanate (PZT) thin films was achieved on i ...

Institute of Physics2015

Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

A measurement setup for the detailed study of the transverse piezoelectric coefficient e(31,f) in the converse (actuator) mode was developed. It allows the assessment of the piezoelectric stress in thin films on silicon cantilevers and provides for a corre ...

Institute of Electrical and Electronics Engineers2015

Process optimisation of a MEMS based PZT actuated microswitch

In this work the fabrication of a piezoelectrically actuated microswitch for high current applications is proposed. The device was obtained by assembling two silicon substrates: one containing the signal lines and the other enclosing a silicon nitride (Si3 ...

Elsevier Science Bv2014