Person

Matthias Neuenschwander

This person is no longer with EPFL

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https://people.epfl.ch/matthias.neuenschwander

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Matthias Neuenschwander

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Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

A polymer-semiconductor-ceramic cantilever for high-sensitivity fluidcompatible microelectromechanical systems

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

Fabrication of fluid-compatible trilayer cantilevers with integrated piezoelectric actuators

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications

A polymer-semiconductor-ceramic cantilever for high-sensitivity fluidcompatible microelectromechanical systems