Matthias Neuenschwander

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Matthias Neuenschwander

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A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications.

Batch Fabrication of Multilayer Polymer Cantilevers with Integrated Hard Tips for High-Speed Atomic Force Microscopy

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Batch Fabrication of Multilayer Polymer Cantilevers with Integrated Hard Tips for High-Speed Atomic Force Microscopy

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications.