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The microstructure and open-circuit voltage of n-i-p microcrystalline silicon solar cells were discussed. A mixed phase layer consisting of amorphous plus microcrystalline material was observed at the bottom of the solar cell and identified as one of the k ...
Undoped hydrogenated amorphous silicon layers deposited at different values of very high frequency (VHF) powers and silane to hydrogen dilution ratios possess various types of microstructures. Transport and defect measurements on layers suggest that struct ...
Hydrogenated microcrystalline silicon i-layers were deposited with a fixed silane concentration on various substrates and incorporated into n-i-p solar cells. 'Average crystallinity' and detailed microstructure of layers and devices were evaluated by X-ray ...
Microcrystalline silicon growth using very high frequency-glow discharge PECVD has been studied under conditions of high pressure and high VHF-power conditions. Hereby, the influence of the total gas flow and the silane concentration on the deposition rate ...
