Person
Annalisa De Pastina
Related publications (25)
Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina
We introduce a detailed design and fabrication process of Silicon microcantilever arrays for biomolecular detection in liquid environment, utilized with laser readout. We present typical fabrication problems and provide related solutions to obtain high qua ...
Amsterdam2024Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel
Philippe Renaud, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Damien Maillard, Stefano Silvio Giovanni Varricchio, Carlo Ricciardi, Davide Scaiola, Stefano Stassi
Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...
ELSEVIER2020Suspended micro/nano channel resonators: a review
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina
Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the ...
IOP PUBLISHING LTD2020Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
Paul Muralt, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Ramin Matloub Aghdam, Kaitlin Marie Howell, Waqas Bashir
Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction ha ...
2019Engineered acoustic mismatch for anchor loss control in contour mode resonators
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi
Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...
2019Modular interface and experimental setup for in-vacuum operation of microfluidic devices
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Damien Maillard, Tom Larsen
We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brin ...
AMER INST PHYSICS2019Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan
This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...
IEEE2019Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan
In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...
IEEE2019PZE-transduced Suspended Microchannel Resonators for sensing applications
This PhD thesis aims at developing a system which can measure the mechanical properties of fluidic samples in the picoliter range. The ultimate goal is the characterization of cancer cells and viscoelastic fluids (i.e. biological fluids), in order to study ...
EPFL2018Energy dissipation in hollow beam resonators in function of microfluidic channel off-axis placement
Annalisa De Pastina, Mauricio Lucena Couto
Suspended Microchannel Resonators (SMRs) are hollow resonant structures containing an embedded u-shaped micro fluidic channel. Having the sample fluid confined inside the resonator allows for real time detection of liquid compounds while the device quality ...
2017