Person
Andrea Lozzi
This person is no longer with EPFL
Related publications (12)
Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators
Luis Guillermo Villanueva Torrijo, Marco Liffredo, Andrea Lozzi
In this paper we investigate the direct effect of resonator quality factor (Q) on the oscillator phase noise. We use 2-port contour mode resonators (CMRs), fabricated both with aluminum nitride (AlN) and aluminum scandium nitride (AlScN), as the frequency- ...
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2020Longitudinal neural and vascular structural dynamics produced by chronic microelectrode implantation
Implanted microelectrode arrays sense local neuronal activity, signals which are used as control commands for brain computer interface (BCI) technology. Patients with tetraplegia have used BCI technology to achieve an extraordinary degree of interaction wi ...
ELSEVIER SCI LTD2020AlN and AlScN contour mode resonators for MEMS-based RF front ends
Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...
EPFL2019Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators
Luis Guillermo Villanueva Torrijo, Marco Liffredo, Andrea Lozzi
This paper presents the first phase noise (PN) measurements of oscillators based on aluminum scandium nitride (AlScN) resonators. 2-port AlScN contour mode resonators (CMR) operating at 195 MHz arc fabricated. A large pool of Q values (ranging from 150 to ...
IEEE2019Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%
Paul Muralt, Luis Guillermo Villanueva Torrijo, Andrea Lozzi
In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pu ...
2019Engineered acoustic mismatch for anchor loss control in contour mode resonators
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi
Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...
2019Characterization of Contour Mode Resonators
In this report, the in uence of several geometric parameters on the performance of aluminum nitride (AlN) contour mode resonators (CMR) is investigated at dierent frequencies (182 MHz, 460 MHz and 570 MHz). Main in uence is the anchor width (Wa) and the an ...
2017Piezoelectric Nanoelectromechanical Systems
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Tom Larsen, Andrea Lozzi, Kaitlin Marie Howell, Muhammad Faizan
In this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS. ...
2017Release area confinement in Contour Mode Resonators
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi
In this paper we propose a modified fabrication process to finely define the region surrounding the resonator that undergoes Si etching in CMRs. The unpredictable undercut has been shown to lead to Q instability within microns' variation. High aspect ratio ...
Ieee2017Finite Element Modeling of Acoustic Shielding via Phononic Crystal structures
Clémentine Sophie Sarah Lipp, Andrea Lozzi
Quality factor of Contour Mode Resonators (CMR) are mainly affected by energy losses due to acoustic waves leaving the resonator through the anchors. An engineering of the anchors in order to create a periodic variation in the acoustic impedance of the mat ...
2016