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Kaoru Yamashita

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Related publications (2)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Vibration Mode of MEMS Ultrasonic Sensors on Buckled Diaphragms with Piezoelectric Resonance Frequency Modification

Paul Muralt, Kaoru Yamashita

Vibration mode and resonance frequency of piezoelectric MEMS ultrasonic sensors was investigated on buckled diaphragm structures. The buckling of the diaphragms was introduced intrinsically through residual stress control of the piezoelectric film, and ext ...

IEEE2019

Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

Paul Muralt, Thomas La Grange, Silviu Cosmin Sandu, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko, Kaoru Yamashita

Accurate property determination of the piezoelectric thin film material Al(1-x)Sc(x)N is necessary for designing the next generation of radio frequency resonators in mobile communication, and for testing results of ab initio calculations. Sound velocity an ...

WILEY2019