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Marsha Mary Parmar

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Related publications (2)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 mu m

Luis Guillermo Villanueva Torrijo, Tom Larsen, Marsha Mary Parmar, Sayedeh Shirin Afyouni Akbari

In this paper ultra clean monolayer and bilayer Chemical Vapor Deposited (CVD) graphene membranes with diameters up to 500 mu m and 750 mu m, respectively have been fabricated using Inverted Floating Method (IFM) followed by thermal annealing in vacuum. Th ...

Nature Research2020

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

Luis Guillermo Villanueva Torrijo, Muhammad Faizan, Marsha Mary Parmar

In this paper, we present the fabrication of on-chip piezoelectric acoustic actuation for 2D materials. Acoustic actuation is achieved at device level through patterning of aluminum nitride (AlN) thin film at wafer scale. Two piezoelectric stacks consistin ...

IEEE2019