Person

Rebecca Camilla Leghziel

This person is no longer with EPFL

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https://people.epfl.ch/rebecca.leghziel

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Rebecca Camilla Leghziel

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The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias

System and method for removing scalloping and tapering effects in high aspect ratio through-silicon vias of wafers

The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias

System and method for removing scalloping and tapering effects in high aspect ratio through-silicon vias of wafers