Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary t ...
We propose a system of narrow FBARs with alternating voltage polarity on top electrodes on the LN platelet and a common bottom floating electrode positioned on a substrate with high acoustic velocity (SiC). This is a YBAR device that is attached to a SiC s ...
Institute of Electrical and Electronics Engineers Inc.2024
