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Rémy Fournier

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Related publications (2)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Méthode de libération d'une pièce micromécanique et pièce micromécanique comprenant des attaches sacrificielles

Simon Nessim Henein, François Barrot, Johannes Richard Cornelis Geerit Kruis, Rémy Fournier

A method for fabricating a micromechanical part from a substrate in which the part is fabricated by providing a plurality of fasteners between the part and the substrate, the fasteners being sacrificial, characterized in that the fasteners include at least ...

Organisation Mondiale de la Propriété Intellectuelle2013

Design and fabrication of a novel centimeter scale three dimensional silicon tip, tilt and piston mirror mechanism

François Barrot, Dara Zaman Bayat, Johannes Richard Cornelis Geerit Kruis, Rémy Fournier

A novel centimetre scale tip tilt piston mirror mechanism has been designed in silicon. The mirror consists of three identical mechanism parts and one mirror part. The fabrication of the parts was done with photolithography and Deep Reactive Ion Etching an ...

2013