Publication

Nanostenciling for fabrication and interconnection of nanopatterns and microelectrodes

Related publications (37)

A diamond-based scanning probe spin sensor operating at low temperature in ultra-high vacuum

We present the design and performance of an ultra-high vacuum (UHV) low temperature scanning probe microscope employing the nitrogen-vacancy color center in diamond as an ultrasensitive magnetic field sensor. Using this center as an atomic-size scanning pr ...

Amer Inst Physics2014

Photocatalytic Nanolithography of Self-Assembled Monolayers and Proteins

Esther Amstad

Self-assembled monolayers of alkylthiolates on gold and alkylsilanes on silicon dioxide have been patterned photocatalytically on sub-100 nm length-scales using both apertured near-field and apertureless methods. Apertured lithography was carried out by me ...

American Chemical Society2013

Structural and energetic basis for hybridization limits in high-density DNA monolayers

Alessandro Barducci

High-density monolayers (HDMs) of single-strand (ss) DNA are important nanoscale platforms for the fabrication of sensors and for mechanistic studies of enzymes on surfaces. Such systems can be used, for example, to monitor gene expression, and for the con ...

Royal Society of Chemistry2013

Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning

Nico de Rooij, Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos, Peter Van der Wal

Processing fl exibility and good mechanical properties are the two major reasons for SU-8 extensive applicability in the micro-fabrication of devices. In order to expand its usability down to the nanoscale, conductivity of ultra-thin SU-8 layers as well as ...

Wiley-Blackwell2012

Reusable Nanostencils for Creating Multiple Biofunctional Molecular Nanopatterns on Polymer Substrate

Hatice Altug, Serap Aksu, Min Huang

In this paper, we demonstrate a novel method for high throughput patterning of bioprobes with nanoscale features on biocompatible polymer substrate. Our technique, based on nanostencil lithography, employs high resolution and robust masks integrated with a ...

2012

Ion Beam Deposition and STM Analysis of Macromolecules on Solid Surfaces in UHV

Nicha Thontasen

Organic and biological macromolecules have attracted great interest within nanotechnology research due to properties that can be useful in future devices. Interesting functionalities such as optical activity, host-guest binding and molecular recognition ar ...

EPFL2011

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

Luis Guillermo Villanueva Torrijo

The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 or nanoscaled structures, standard silicon atomic forc ...

2010

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

Jürgen Brugger, Andreea Veronica Savu

We present a parallel, full wafer technique for deposition of catalyst on released scanning probe bodies for the growth of individual high aspect-ratio Si nanowire tips. 1-D probes are necessary for imaging high aspect-ratio nano-patterns, such as deep and ...

2010

Stimuli-responsive nanostructured surfaces

Ana Maria Popa

The coupling of stimuli-responsive macromolecules to nanostructured surfaces opens the perspective for the fabrication and integration of "smart" micro- and nano-electro-mechanical systems (MEMS&NEMS) in which the smallest motile unit is the polymeric chai ...

EPFL2009

Nanostenciling for combinatorial fabrications and interconnections of nanopatterns and microelectrodes

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Sébastien Gauthier

Stencil lithography is used for patterning and connecting nanostructures with metallic microelectrodes in ultrahigh vacuum. Microelectrodes are fabricated by static stencil deposition through a thin silicon nitride membrane. Arbitrary nanoscale patterns ar ...

2007

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