Publication

Microfabricated electrically conducting and wear-resistant nanoprobes for scanning probe applications

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Recently electrically conducting SPM probes were used as read/write sensor of magneto-resistive nanopillars and ferroelectric domains in the development of >1 Tb/inch2 data storage. Since metal coated (platinum (Pt) or Pt/iridium) silicon (Si) probes are n ...

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Full tungsten and platinum nanoprobes for electrically conducting scanning probe methods

Jürgen Brugger, Johannes Steen

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HYBRID SPM PROBE WITH PLATINUM CANTILEVER AND TIP FOR ELECTRICALLY CONDUCTING MODE SPM EXPERIMENTS

Jürgen Brugger, Johannes Steen

2006

Full tungsten and platinum nanoprobes for electrically conducting scanning probe methods

Jürgen Brugger, Johannes Steen

We have developed hybrid AFM probes with SU-8 polymer body and full platinum and tungsten cantilever and tip. The fabrication process uses surface micromachining of a (100) silicon wafer. The metal (platinum or tungsten) is sputter deposited in oxidation s ...

2006

Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications

Jürgen Brugger, Andrzej Kulik, Giovanni Boero, Florian Calame, Johannes Steen

We have developed a new hybrid AFM probe combining an SU-8 polymer body with a full tungsten cantilever having a nanometric tip. The fabrication is based on surface micromachining a silicon wafer, where tungsten is sputter deposited in oxidation sharpened ...

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Luis Guillermo Villanueva Torrijo

We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define ...

2006

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