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Micromachined tunable devices based on silicon integrated BaxSr1-xTiO3 thin films

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Epitaxial Piezoelectric MEMS on Silicon

Don Isarakorn

Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due ...

EPFL2011

SWNT array resonant gate MOS transistor

Mihai Adrian Ionescu, Anupama Arun

We show that thin horizontal arrays of single wall carbon nanotubes (SWNTs) suspended above the channel of silicon MOSFETs can be used as vibrating gate electrodes. This new class of nano-electromechanical system (NEMS) combines the unique mechanical and e ...

2011

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications

Nico de Rooij, Danick Briand, Jinyu Jason Ruan, Pattanaphong Janphuang, Robert Andrew Lockhart, Don Isarakorn

Bulk PZT ceramics provide high electromechanical coupling (k) which is desirable for piezoelectric energy harvesters since the energy transformed from a mechanical agitation into an electrical output is proportional to k2 [1-2]. However, piezoelectric cant ...

2011

The Vibrating Body Transistor

Mihai Adrian Ionescu, Daniel Grogg

This paper presents a hybrid resonator architecture called the vibrating body field-effect transistor (VB-FET), which combines a silicon microelectromechanical (MEM) resonator and a FET in a single device. The active device provides improved motion sensing ...

2011

Parametric Channelized Receiver for Single-Step Spectral Analysis

Camille Sophie Brès

We present new parametric channelized receiver for instantaneous RF spectrum characterization. Single resonant cavity filter combined with parametric wavelength multicasting achieved simultaneous channelization of 10GHz signal with 1GHz resolution and exti ...

2011

AIN Thin Film Structures for High-Q Resonators

Alvaro Artieda

The development of wireless and mobile communication in the last decade led to the elaboration of new components based on thin films with continually increasing performance and reduced fabrication cost. A fundamental element for mobile communication is the ...

EPFL2010

Tunable thin film bulk acoustic wave resonator based on BaxSr1-xTiO3 thin film

Nava Setter, Paul Muralt, Alexander Tagantsev

A tunable membrane-type thin film bulk acoustic wave resonator (TFBAR) based on a Ba0.3Sr0.7TiO3(BST) thin film has been fabricated. The resonance and antiresonance frequencies of the device can be altered by applying a dc bias: both shift down with increa ...

2010

Epitaxial piezoelectric MEMS on silicon

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Don Isarakorn

This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...

Institute of Physics2010

Effect of mechanical loading on the tuning of acoustic resonances in Ba (x) Sr1-x TiO3 thin films

Nava Setter, Alexander Tagantsev

The effect of mechanical loading on the tuning performance of a tunable Thin Film Bulk Acoustic Wave Resonator (TFBAR) based on a Ba0.3Sr0.7TiO3 (BST) thin film has been investigated experimentally and theoretically. A membrane-type TFBAR was fabricated by ...

Springer US2010

Active Microelectromechanical Resonator

Daniel Grogg

The progress in the technology of microelectronic devices has led to a strong miniaturization and high performance for circuits and systems, enabling modern applications such as mobile computing and communications. Today, remaining "off-chip" components th ...

EPFL2010