Publication

Metallo-organic low-pressure chemical vapor deposition of Ta2O5 using TaC12H30O5N as precursor for batch fabrication of microsystems

Related publications (33)

Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication

Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...

EPFL2023

Synthesis of metal oxide-overcoated carbon materials by liquid phase ALD and their applications in catalysis

Farzaneh Talebkeikhah

Coating nano particles and other substrates for efficiency enhancement, protection and obtaining new atomic structures is a widespread research topic in catalysis and material synthesis. Thus far, different approaches of coating, ranging from simplest to s ...

EPFL2023

III-V Nitride Semiconductors Deposited At Low Temperature For Photovoltaic Applications

Jonathan Emanuel Thomet

This thesis reports on the study and use of low temperature processes for the deposition of indium gallium nitride (InGaN) thin films in order to alleviate some of the present drawbacks of its monolitic deposition on silicon for photovoltaic applications. ...

EPFL2023

Characterization of thin film stress for MEMS planarization

The synthesis and stress characterization of metal thin-films deposited on silicon wafers were performed on this project. Two different deposition techniques were employed: magnetron sputtering and Atomic Layer Deposition (ALD). Moreover, different tests w ...

2022

Vapor deposition of metal halide perovskite thin films: Process control strategies to shape layer properties

Christophe Ballif, Quentin Thomas Jeangros, Florent Sahli, Quentin Jean-Marie Armand Guesnay

Vapor-based processes are particularly promising to deposit the perovskite thin film absorber of solar cells. These deposition methods are up-scalable, involve a controlled solvent-free environment, have the ability to conformally coat rough substrates, in ...

2021

Experiments and modelling for glow discharge plasmas applied to niobium sputter deposition in superconducting radiofrequency cavities

Thibaut François Hugo Richard

Thin film coatings are ubiquitous in modern daily lives, from the semi-conductor industry to aesthetic applications, and rely on the modification of a given material to enhance its surface properties. At CERN (European Organization for Nuclear Research), t ...

EPFL2019

Atomic Layer Deposition on Dispersed Materials in Liquid Phase by Stoichiometrically Limited Injections

Jeremy Luterbacher, Benjamin Pierre Le Monnier, Farzaneh Talebkeikhah, Frederick Georges Wells

Atomic layer deposition (ALD) is a well‐established vapor‐phase technique for depositing thin films with high conformality and atomically precise control over thickness. Its industrial development has been largely confined to wafers and low‐surface‐area ma ...

2019

Physical vapour deposition of cyanine salts and their first application in organic electronic devices

Frank Nüesch, Jakob Heier, Antonia Neels, Léo Duchêne, Donatas Gesevicius

A symmetrical trimethine indocyanine dye chromophore was modified with the bistriflylimide anion to study the changes in Coulomb interactions, thermal stability and the volatility of the organic salt. The bulky bistriflylimide anion minimizes electrostatic ...

2019

Feasibility study on a novel daylighting system with embedded micro compound parabolic concentrators (CPCs)

Jean-Louis Scartezzini, Andreas Schueler, André Gabriel Kostro, Jing Gong

A novel glazing system consisting of a polymer layer with embedded micro compound parabolic concentrators (CPCs), which is attached to a glass pane of glazing, is proposed. It aims to reduce the energy consumption due to cooling in buildings, provide dayli ...

SPIE-INT SOC OPTICAL ENGINEERING2018

Explaining Morphological and Electrical Features of Boron-doped Zinc Oxide to Tailor New Electrodes for Photovoltaics

Lorenzo Fanni

TCOs are a class of metal oxides that combine transparency to visible light with electrical conductivity. Each TCO is characterized by the trade-off of these two properties which can be tuned for a particular application. This thesis is dedicated to the in ...

EPFL2016

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.