High vacuum chemical vapor deposition (HV-CVD) of alumina thin films
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Sn and Pt films were laser deposited on a quartz plate or C membrane supports by using light-induced thermal dissocn. and photodissocn. of SnMe4 and bis(hexafluoroacetylacetonato)platinum, resp. An Ar laser (l = 514.5, 455.5, 257.3 nm) and a Hg lamp (l = 2 ...
Hydrogenated amorphous silicon has been prepared at a plasma excitation frequency in the very-high-frequency band at 70 MHz with the glow discharge technique at substrate temperatures between 280 and 50-degrees-C. The structural properties have been studie ...
The selectivity of Cu deposition from bis(hexafluoroacetylacetonato)Cu(II) on SiO2 patterned with a Pt seeding layer was studied as a function of the reagent gas mixt. On Pt, the Cu film growth rate increases with the amt. of H2O vapor in the gas flow, and ...
The rate of photolytic laser chem. vapor deposition (LCVD) of Pt from its bishexafluoroacetylacetonate precursor is measured as a function of the light intensity, the wavelength, the precursor pressure, and the laser beam diam. at the surface. The waveleng ...
Intrinsic stress measurements were carried out on hydrogenated amorphous silicon (a-Si:H) films deposited with different excitation frequencies (13.56-70 MHz), by plasma-enhanced chemical vapor deposition. It was observed that films deposited at 70 MHz hav ...
Similarities and differences in the structure and shape of the metallic deposit were studied for photolytic and pyrolytic laser-induced chem. vapor deposition of Sn and Pt. The photolytically deposited thin metallic films appear to be more homogeneous and ...
Polycryst. diamond films were deposited by hot filament assisted chem. vapor deposition on five metal and insulator substrates. The films obtained were studied by Raman spectroscopy. The position of the Raman line shifts to higher wavenumbers when the ther ...
Energy deposition rates in various materials irradiated in a large 60Co facility have been measured using both CaF2 and LiF TLDs. Since the relationship between energy deposited in the TLD and that deposited in the surrounding medium (1/f factor) was diffe ...
