High coupling materials for thin film bulk acoustic wave resonators
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Two W protection schemes for direct-contact bottom electrodes for PZT thin films, namely RuO2/Cr and RuO2/Ru, were compared with respect to protective performance and contact resistance up to 800 degrees C annealing temperature in oxygen. Cr clearly offers ...
This paper describes a detailed study of the behavior of the parallel spring stage having four circular flexure hinges of very thin cross-sections manufactured by wire electro-discharge machining. The state of the art recalls the abundant literature publis ...
Piezoelectric and dielectric aging was studied in Pb(Zr,Ti)O-3 (PZT) thin films and bulk ceramics. It was found that piezoelectric aging in thin films obeys the logarithmic time dependence with the relative aging rate much higher than that of the dielectri ...
It is shown that at weak alternating stress the relationship between the piezoelectrically induced charge and applied stress in ferroelectric ceramics has the same form as the Rayleigh law for magnetization versus magnetic field in ferromagnetic materials. ...
The contribution from the irreversible displacement of non-180 degrees domain walls to the direct longitudinal piezoelectric d(33) coefficient of BaTiO3 and Pb(Zr,Ti)O-3 ceramics was determined quantitatively by using the Rayleigh law. Effects of the cryst ...
We have studied deposition by in-situ reactive sputtering of ferroelectric Pb(ZrxTi1-x)O3 (PZT) thin films on Pt and RuO2 electrodes, using temperatures in the 490-620°C range. Nucleation on the electrode was found to be of prime importance for the formati ...
The fatigued state of Pt-PZT-Pt ferroelectric capacitors (FECAP) was investigated by means of piezoelectric coefficient, polarisation charge and permittivity measurements. The suppression of switching polarisation P-r(s) appears to be the result of freezin ...
Through the use of relations analogous to that of the Rayleigh law, it is demonstrated that the ac electric field dependence of the permittivity of ferroelectric thin films can be described. It is further shown that both reversible and irreversible compone ...
A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...
The influence of ultraviolet (UV) illumination on piezoelectric properties is investigated in lead zirconate titanate (PZT) thin films. It is found that the poling procedure is more effective when the film is exposed to a broadband UV light in the presence ...