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Input silane concentration effect on the a-Si:H to uc-Si:H transition width

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Input silane concentration effect on the a-Si:H to uc-Si:H transition width

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Limiting factors in the fabrication of microcrystalline silicon solar cells and microcrystalline/amorphous (‘micromorph’) tandems

Plasma Modelling and Diagnostics for the Prediction of Structural Changes in Silicon Thin Film Deposition Plasma Modelling and Diagnostics for the Prediction of Structural Changes in Silicon Thin Film Deposition

Micromorph cells grown at high rate with in-situ intermediate reflector in industrial KAI PECVD reactors

Plasma silane concentration as a determining factor for the transition from amorphous to microcrystalline silicon in SiH4/H-2 discharges

Investigations of radio-frequency, capacitively-coupled large area industrial reactor

Plasma diagnostics as a tool for process optimization: the case of microcrystalline silicon deposition

Microcrystalline silicon deposited at high rate on large areas from pure silane with efficient gas utilization

Rough ZnO Layers by LP-CVD Process and their Effect in Improving Performances of Amorphous and Microcrystalline Silicon Solar Cells

Towards Very Low-Cost Mass Production of Thin-film Silicon Photovoltaic (PV) Solar Modules on Glass

Proton diffusion mechanism in amorphous SiO2