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Optical emission spectroscopy to diagnose powder formation in SiH4-H2 discharges

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Optical emission spectroscopy to diagnose powder formation in SiH4-H2 discharges

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High-Quality Microcrystalline Silicon for Efficient Thin-Film Solar Cells

A New View of Microcrystalline Silicon: The Role of Plasma Processing in Achieving a Dense and Stable Absorber Material for Photovoltaic Applications

Characterization of Kinetic Processes in Nano Pulsed SDBD

On the Powder Formation in the Plasma Enhanced Chemical Vapor Deposition Process for the Deposition of SiOx Barrier Coatings

Improved amorphous/crystalline silicon interface passivation by hydrogen plasma treatment

Control of LPCVD ZnO growth modes for improved light trapping in thin film silicon solar cells

Impact of secondary gas-phase reactions on microcrystalline silicon solar cells deposited at high rate

High-rate deposition of microcrystalline silicon in a large-area PECVD reactor and integration in tandem solar cells

Powder formation in SiH[sub 4]–H[sub 2] discharge in large area capacitively coupled reactors: A study of the combined effect of interelectrode distance and pressure

Optimization of high efficiency silicon heterojunction solar cells using silane-plasma diagnostics