Publications related to AIN Thin Film Structures for High-Q Resonators

Electroacoustic absorbers: Bridging the gap between shunt loudspeakers and active sound absorption

Romain Christophe Rémy Fleury, Hervé Lissek, Romain Boulandet

The acoustic impedance at the diaphragm of an electroacoustic transducer can be varied using a range of basic electrical control strategies, amongst which are electrical shunt circuits. These passive shunt techniques are compared to active acoustic feedbac ...

Acoustical Society of America2011

3.4 GHz composite thin film bulk acoustic wave resonator for miniaturized atomic clocks

Paul Muralt, Alvaro Artieda

Triple layer SiO2/AlN/SiO2 composite thin film bulk acoustic wave resonators (TFBARs) were studied for applications in atomic clocks. The TFBAR's were tuned to 3.4 GHz, corresponding to half the hyperfine splitting of the ground state of rubidium Rb-87 ato ...

American Institute of Physics2011

Low-Power and Widely-Tunable Linearized Biquadratic Low-Pass Transconductor-C Filter

Seyed Armin Tajalli, Yusuf Leblebici

A sixth-order low-pass

g_m

-C filter with a very wide tuning range (

f_c

= 100 Hz to 10 MHz) is presented. The wide tuning range has been achieved without using switchable components or programmable building blocks. A single stage folded-cascode transcon ...

Institute of Electrical and Electronics Engineers2011

The Vibrating Body Transistor

Mihai Adrian Ionescu, Daniel Grogg

This paper presents a hybrid resonator architecture called the vibrating body field-effect transistor (VB-FET), which combines a silicon microelectromechanical (MEM) resonator and a FET in a single device. The active device provides improved motion sensing ...

2011

Parametric feedback oscillators

Luis Guillermo Villanueva Torrijo

A parametric feedback oscillator includes a resonator which has at least one transduction element and at least one electromechanical resonating element. The resonator is configured to accept as input a parametric excitation signal at a frequency 2[omega]0 ...

2011

Active Microelectromechanical Resonator

Daniel Grogg

The progress in the technology of microelectronic devices has led to a strong miniaturization and high performance for circuits and systems, enabling modern applications such as mobile computing and communications. Today, remaining "off-chip" components th ...

EPFL2010

Epitaxial piezoelectric MEMS on silicon

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Don Isarakorn

This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...

Institute of Physics2010

Dielectric and acoustical high frequency characterisation of PZT thin films

Paul Muralt, Janine Conde

Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...

Iop Publishing Ltd, Dirac House, Temple Back, Bristol Bs1 6Be, England2010

Highly piezoelectric AlN thin films grown on amorphous, insulating substrate

Paul Muralt, Silviu Cosmin Sandu, Alvaro Artieda

AlN thin films were grown by reactive sputtering on amorphous SiO2 thin films. Film texture, x-ray rocking curve width, mechanical stress, and the clamped piezoelectric constant d33,f were studied as a function of rf bias power and substrate roughness. A h ...

2010

RF MEMS Switches for Wide-band (5 - 40 GHz), Tuneable Filters and DMTL Phase Shifters

Montserrat Fernandez-Bolanos Badia

In wireless communications, radio frequency micro-electro-mechanical systems (RF MEMS) technology is attracting tremendous interest across the world as the needs of frequencies gets higher, data bandwidth gets larger and multiple broadband signals have to ...

EPFL2010

AIN Thin Film Structures for High-Q Resonators

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Electroacoustic absorbers: Bridging the gap between shunt loudspeakers and active sound absorption

3.4 GHz composite thin film bulk acoustic wave resonator for miniaturized atomic clocks

Low-Power and Widely-Tunable Linearized Biquadratic Low-Pass Transconductor-C Filter

The Vibrating Body Transistor

Parametric feedback oscillators

Active Microelectromechanical Resonator

Epitaxial piezoelectric MEMS on silicon

Dielectric and acoustical high frequency characterisation of PZT thin films

Highly piezoelectric AlN thin films grown on amorphous, insulating substrate

RF MEMS Switches for Wide-band (5 - 40 GHz), Tuneable Filters and DMTL Phase Shifters

Electroacoustic absorbers: Bridging the gap between shunt loudspeakers and active sound absorption

3.4 GHz composite thin film bulk acoustic wave resonator for miniaturized atomic clocks

Low-Power and Widely-Tunable Linearized Biquadratic Low-Pass Transconductor-C Filter

The Vibrating Body Transistor

Active Microelectromechanical Resonator

Parametric feedback oscillators

RF MEMS Switches for Wide-band (5 - 40 GHz), Tuneable Filters and DMTL Phase Shifters

Epitaxial piezoelectric MEMS on silicon

Dielectric and acoustical high frequency characterisation of PZT thin films

Highly piezoelectric AlN thin films grown on amorphous, insulating substrate