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A process for the deposition of a solid layer onto a liquid is presented. The polymer poly-di-chloro-paraxylylene, also known as Parylene C, was grown on low vapour pressure liquids using the conventional low pressure chemical vapour deposition process. A reactor was built and a process developed to enable the deposition of Parylene C at atmospheric pressure over high vapour pressure liquids. It was used to deposit Parylene C over water among others. In all cases Parylene C encapsulated the liquid without influencing its initial shape. The results presented here show also that the Parylene C properties are not affected by its growth on liquid templates and the roughness of the Parylene C surface in contact with the liquid during the deposition is extremely low. (c) 2010 Elsevier B.V. All rights reserved.
Mohamed Farhat, Ali Amini, Martino Reclari
Athanasios Nenes, Spyros Pandis
Christophe Ballif, Quentin Thomas Jeangros, Florent Sahli, Cédric Bucher, Aymeric Michel Schafflützel, Björn Niesen, Léo Duchêne, Quentin Jean-Marie Armand Guesnay, Niccolo Salsi, Nathanaël Miaz