Direct polymer patterning by high energy reactive ion beam through stencil masks
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We present preliminary results for thin films grown with a recently commissioned ion beam codeposition system designed for in situ growth and etching of YBCO films. The apparatus consists of a high-vacuum chamber (10-7 Torr) equipped with four Kaufmann ion ...
In situ Fourier transform infrared absorption spectroscopy has been used to study the composition of particles formed and suspended in radio-frequency discharges of silane-oxygen-argon gas mixtures. The silane gas constumption was observed by infrared abso ...
Spin-coated solid films of the gold-cluster compd. dodeca-(triphenylphosphine), hexa(chloro)pentapentacontagold Au55(PPh3)12Cl6 are irradiated with a focused 20-keV Ga+ focused-ion beam. Writing speeds on the substrate ranged from 50 up to 2000 mm/s. This ...
Detailed investigations of the limits of a new negative-tone near-UV resist (IBM SU-8) have been performed. SU-8 is an epoxy-based resist designed specifically for ultrathick, high-aspect-ratio MEMS-type applications. We have demonstrated that with single- ...
Spin-coated solid films of the gold-cluster compd. dodeca-(triphenylphosphine), hexa(chloro)pentapentacontagold Au55(PPh3)12Cl6 are irradiated with a focused 20-keV Ga+ focused-ion beam. Writing speeds on the substrate ranged from 50 up to 2000 mm/s. This ...
The authors have produced YBaCuO thin films by mono-target ion beam sputtering. Post annealing in O2 at 850°C results in superconducting films on (100) SrTiO3 with R=0 at ~60 K. Preliminary results of chemical analysis of the films by X-ray photoelectron s ...
The authors report on the in-situ growth over large area of high-quality homogeneous YBa2Cu3O7-x films by single target ion beam sputtering. The 123 stoichiometry transfer to the substrates is obtained by using sufficiently low power ion beams and a grazin ...