Nico de Rooij, Terunobu Akiyama, André Meister
A micro pump was integrated into a scanning force microscope probe for circulating liquid through its hollow cantilever and tip. The interior cross section of the cantilever was 2.25 mu m x 3.75 mu m. All fluidic parts were made of SiO2, while the tip apex ...
Elsevier2008