Equivalent Circuit for RF Flexural Free-Free MEMS Resonators

A method to extract a lumped-parameter equivalent circuit for a free-free flexural MEMS resonator, based on the Euler-Bernoulli beam equation and exploiting a modal analysis approach, is presented. The dynamic behaviour predicted by the equivalent circuit is compared with FEM simulations, and the effect of a geometrical mismatch is investigated as well. The resonance frequency and the quality factor are correctly predicted. The method could be used for more complex systems of interconnected beams. The circuit can be used as a quick and intuitive analysis tool for the system-level designer and to allow the simulation of the device in a system-level design environment.