Publication

Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications

Related publications (40)

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

, , , , ,

This work addresses the need for precise control of thin film sputtering processes to enable thin film material tailoring on the example of zinc tin nitride (ZTN) thin films deposited via microwave plasma-assisted high power reactive magnetron sputtering ( ...

Amer Chemical Soc2024

Nanomechanical resonators with low dissipation for quantum optomechanics

Alberto Beccari

Fields of technology as diverse as microwave filter construction, characterization of material interfaces with atomic precision, and detection of gravitational waves from astronomical sources employ mechanical resonators at their core. The utility of mecha ...

EPFL2023

Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication

Caroline Hain

Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...

EPFL2023

Aperture-Controlled Fabrication of All-Dielectric Structural Color Pixels

Olivier Martin, Philippe Renaud, Arnaud Bertsch, Daniel Migliozzi, Evgenii Glushkov, Clémentine Sophie Sarah Lipp, Hsiang-Chu Wang, Audrey Zoé Marie Jacquillat

While interference colors have been known for a longtime, conventionalcolor filters have large spatial dimensions and cannot be used tocreate compact pixelized color pictures. Here we report a simple yetelegant interference-based method of creating microsc ...

AMER CHEMICAL SOC2023

Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...

IEEE2022

Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators

Teodoro Graziosi

Microresonators are fundamental building blocks of any photonic integrated circuit, as they can be used as filters, modulators, sensors, and to enhance light emission. If these resonators are suspended and are free to oscillate, we can exploit the interact ...

EPFL2019

Micromechanical resonators with sub-micron gaps filled with high-k dielectrics

Mariazel de la Candelas Maqueda López

Scaled microelectromechanical (MEMS) resonating devices have generated a great interest for their use in RF front-end architectures for wireless communication, channel-select filters, on-chip signal processing and timing and extreme mas sensing application ...

EPFL2017

3D monolithic dielectrophoretic actuators and resonators written by femtosecond laser

Tao Yang

The last few decades have witnessed exciting advances in micro-opto-electro-mechanical systems (MOEMS) including revolutionary development of fabrication processes and an ever increasing expansion of their domain of applications. In parallel, femtosecond l ...

EPFL2017

Asymmetrically coupled resonators for mass sensing

Luis Guillermo Villanueva Torrijo

Mechanically coupled resonators have been applied in the last years to the development of nanomechanical mass-sensors based on the detection of the different vibration modes of the system by measuring on a single resonator. Their sensitivity and capability ...

American Institute of Physics2017

Snow avalanches striking water basins: behaviour of the avalanche's centre of mass and front.

Christophe Ancey

We study the behaviour of a low-density granular material entering a water basin by means of a simplified two-dimensional model, with the aim to understand the dynamics of a snow avalanche impacting a water basin like an alpine lake or a fjord. The low den ...

Springer Verlag2017