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CMOS planar 2D micro-fluxgate sensor

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A CMOS Microsystem Combining Magnetic Acuation and In-Situ Optical Detection of Microparticles

Edoardo Charbon, Martinus Gijs, Ulrike Lehmann, Cristiano Niclass, Stefano Pietrocola

We present a CMOS-based hybrid microfluidic system that combines the manipulation of magnetic microparticles through a magnetic field with in situ optical detection via single photon avalanche diodes (SPADs). Magnetic particles are actuated within a glass ...

2007

Circular Hall transducer for angular position sensing

Radivoje Popovic, Pavel Kejik

We developed a new integrated magnetic sensor based on the Hall effect, suitable for contactless 360 degrees absolute angle encoding. The sensing device consists of a narrow n-well ring with a chain of 64 contacts equally distributed along the ring. It is ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2007

CMOS magnetic sensors with integrated ferromagnetic parts

Radivoje Popovic, Pavel Kejik, Predrag Drljaca

The paper deals with Hall and flux-gate magnetic field sensors consisting of integrated combination of CMOS ASICs and planar ferromagnetic components. Ferromagnetic parts are made of a soft amorphous alloy, integrated at the CMOS wafer in a post-processing ...

Elsevier2006

Low-power 2-D fully integrated CMOS fluxgate magnetometer

Radivoje Popovic, Pavel Kejik, Franck Vincent, Predrag Drljaca

In this paper, we present a low-power, two-axis fluxgate magnetometer. The planar sensor is integrated in a standard CMOS process, which provides metal layers for the coils and electronics for the signal extraction and processing. The ferromagnetic core is ...

Institute of Electrical and Electronics Engineers2005

Highly sensitive vertical hall sensors in CMOS technology

Enrico Schurig

Vertical Hall sensors are capable of measuring surface-parallel components of the magnetic field. They allow therefore relatively easy conception of single-chip multi-axial magnetic sensors compared to solutions using horizontal Hall plates. The modern tre ...

EPFL2005

A novel planar magnetic sensor based on orthogonal fluxgate principle

Radivoje Popovic, Pavel Kejik, Franck Vincent, Ozge Zorlu

In this paper, we present a new planar fluxgate magnetometer structure. The sensor has the orthogonal fluxgate configuration which makes the detection part independent of the excitation mechanism. The sensor consists of a ferromagnetic cylindrical core cov ...

2005

Magnetic detector made on a semiconductive substrate

Pavel Kejik

Excitation circuit is formed by a single planar coil of an essentially square shape (9) with the magnetic core (10) in the f of a diagonal cross with the legs (101, 102) extending towards the corners of the square defined by the outer circumference (90) th ...

2005

Miniaturized hybrid inductors and transformers

In the frame of this thesis, we have developed a novel batch-type technology for the realization of three-dimensional millimeter-size transformers for ultra-small low-power (0.1-1 Watt) applications. The technology is based on the three-dimensional micropa ...

EPFL2005

Integrated fluxgate compass for portable applications

Predrag Drljaca

Modern applications in industry, navigation and medicine demand small and sensitive magnetic field sensors. In this thesis we have developed a new planar micro fluxgate magnetometer. High resolution, low power consumption and orthogonal fields detection ma ...

EPFL2004

Single core fully integrated CMOS micro-fluxgate magnetometer

Radivoje Popovic, Pavel Kejik, Franck Vincent, Predrag Drljaca

A new fully integrated 2D micro-fluxgate magnetometer is presented. This magnetometer is integrated in a standard CMOS process and uses a ferromagnetic core integrated on the chip by a photolithographic post-process compatible with the integrated circuit t ...

Elsevier2004