Sub-Micron Nano-Composite CoC Hall Sensors by Focused Electron-Beam Induced Deposition for Microbead Detection
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We report on the fabrication and electrical characterization of functionalized solid-state nanopores in low stress silicon nitride membranes. First, a pore of approximately 50 nm diameter was drilled using a focused ion beam technique, followed by the loca ...
In-situ materials tests have the advantage to link visual and sensor based information during a dynamic experiment. In this thesis, a compact indenter-scratch test device has been built at EPFL-LSRO and installed inside a Scanning Electron Microscope (SEM) ...
The focused electron beam induced deposition process is a promising technique for nano and micro patterning. Electrons can be focused in sub-angström dimensions, which allows atomic-scale resolution imaging, analysis, and processing techniques. Before the ...
Thin silicon oxide (SiOx) barrier coatings formed by plasma enhanced chemical vapor deposition on poly(ethylene terephthalate) (PET) substrates were subjected to post-deposition annealing treatments in the temperature range for orientation relaxation of th ...
A flexible method for simultaneous nanoscale structures fabrication and patterning is described, using a combination of stencil mask and pulsed-laser deposition (PLD) techniques. A miniature shadow-mask with nano-apertures in a very thin microfabricated me ...
This thesis work focuses on impact and diffusion processes as well as equilibrium positions of a metal deposited on a surface. The metal is deposited in the form of clusters containing n atoms in a controlled way. Gold or silver clusters cations (Au+n and ...
Carbon nanofibers (CNF) were synthesized on sintered metal fibers (SMF) filters of nickel and Ni-containing alloys (Inconel, stainless steel (SS)) by thermal chemical vapor deposition of ethane in the presence of hydrogen at not, vert, similar660 °C. The C ...
Anewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active a ...
Titanium aluminium nitride (TiAlN)-based coatings are designed specially for applications where oxidation and wear resistance are primary demands, as in the case of cutting tools. Moreover the coatings are required to be thermally stable as well as have go ...
A versatile method for parallel nanoscale structures fabrication and patterning, using a combination of stencil-mask and pulsed-laser deposition (PLD) techniques is presented. A miniature shadow-mask with nano-apertures in a very thin microfabricated membr ...