Biomimetic soft lithography on curved nanostructured surfaces
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We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical charac ...
Herein, a study of combining refractive microlenses arrays and nanostructured antireflective surfaces is presented. Fabrication method is surveyed for obtaining the hybrid surface with functionalities of refractive and antireflective (high-transmissive) el ...
The development of nanosystems and nano-devices demands for patterning methods in the nanoscale. To bring them to the market, there is a need for fast, low-cost nanopatterning methods. In addition, an increased flexibility is important for the engineering ...
This work presents the development of two MEMS programmable diffraction gratings designed for spectroscopic applications in the visible, near- and mid-infrared. These devices have been developed to limit distortion of their optical surfaces at rest and thr ...
The main topic of this thesis is the fabrication and characterization of structures smaller than the wavelength of light, for operation in the visible or near infrared spectral range. In the first part of this thesis, the fabrication of periodic structures ...
We present a parallel, full wafer technique for deposition of catalyst on released scanning probe bodies for the growth of individual high aspect-ratio Si nanowire tips. 1-D probes are necessary for imaging high aspect-ratio nano-patterns, such as deep and ...
The mid-infrared range is of interest in spectroscopic applications, due to the large number of organic compounds that exhibit characteristic absorption bands in this spectral region. Semiconductor technology, however, has been developed mainly for the nea ...
A subwavelength-scale square lattice optical nanostructure is fabricated using an interference photolithography process on the surface of a quartz microlens array. This nanostructuring of the quartz surface introduces an antireflective effect, reducing ref ...
We are developing micromirror arrays (MMA) for future generation infrared multiobject spectroscopy (MOS) requiring cryogenic environment. So far we successfully realized small arrays of 5 x 5 single-crystalline silicon micromirrors. The 100 mu m x 200 mu m ...
SPIE-Intl Soc Optical Engineering, PO Box 10, Bellingham, Wa 98227-0010 Usa2008
Stencil lithography is a surface patterning technique that relies on the local physical vapor deposition of material through miniaturized shadow mask membranes. It is extremely useful for the formation of patterns, mainly thin structured metal films, in si ...