Romuald Houdré, Rolando Ferrini
This work addresses feature size effects (the lag-effect and roughness development) in chemically assisted ion beam etching (CAIBE) etching of InP-based photonic crystals. Photonic crystal fields with varying hole size and periods were etched with differen ...
International Society for Optical Engineering, Bellingham WA, WA 98227-0010, United States2006