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Probing molecular absorption under slow-light propagation using a photonic crystal waveguide

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Tunable optical filter of porous silicon as key component for a MEMS spectrometer

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

We present a microspectrometer based on a tunable interference filter for infrared or visible light that scans the desired part of the spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This conce ...

2002

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We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. infrared absorption spectroscopy can distinguish gases easily and also detect nonreactive molecules like CO2, in contrast to e.g. metal oxide gas sensors The foll ...

2001

Microspectrometer based on a tunable optical filter of porous silicon

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

We present a tunable interference filter for infrared and visible light that scans the desired part of the optical spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This concept avoids expensive ...

2001

Boron nitride films were deposited by r.f. capacitively-coupled plasma (13.56 MHz) using two different gas mixtures: Ar-B2H6-NH3 and Ar-B2H6-N-2. In order to study the gas-phase reactions of the plasma in situ Fourier transform infrared absorption spectros ...

2000

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2000

Investigations of CH4, C2H2 and C2H4 dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry

Christoph Hollenstein, Christian Deschenaux

Infrared (IR) absorption spectroscopy and mass spectrometry have been simultaneously applied to dusty radiofrequency (RF) plasmas in methane, acetylene and ethylene. The combination of IR absorption spectroscopy and mass spectrometry allows the chemical co ...

1999

A fibre Bragg grating filter device, tunable over 45 nm, is reported. The device has a wavelength setting time below 1.5 ms and a maximum tuning speed of 21 nm/ns ...

Soc. Electr. Electron1999

Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectrometry

Christoph Hollenstein, Alan Howling

In situ Fourier transform infrared absorption spectroscopy has been used to study the composition of particles formed and suspended in radio-frequency discharges of silane-oxygen-argon gas mixtures. The silane gas constumption was observed by infrared abso ...

1998

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In situ Fourier transform infrared (FTIR) absorption spectroscopy has been used to determine the fractional depletion of silane in a radio-frequency (ri) glow discharge. The technique used a simple single-pass arrangement and was implemented in a large-are ...

1998

Quantitative diffuse reflectance and transmittance infrared spectroscopy of nondiluted powders

Hubert van den Bergh, Jacques-Edouard Moser

An adaptation of Kubelka's general model of diffuse reflectance and diffuse transmittance of light to nonideal scattering samples is proposed. It is applied to quant. Fourier transform IR spectrometry of nondiluted surface-derivatized silica powders. Corre ...

1992