Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes
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Having a composition closed to the morphotropic phase boundary, PZT films of 14 mu m thickness with a porosity less than 7% were prepared by the double print double firing method. At room temperature the dielectric constant, remanent polarization and coerc ...
The domain nucleation and growth during polarization switching in Pb(Zr,Ti)O-3 (PZT) ferroelectric thin film capacitors with Pt top (TE) and bottom electrodes (BE) were studied by means of atomic force microscopy (AFM). The experimental configuration used ...
In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film ...
The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems ar ...
A surprising non-cumulative effect of the degradation mechanism (fatigue) of the switched polarization (P-r(s)), was observed in MOCVD and sol-gel prepared Pb(Zr0.47Ti0.53)O-3 (PZT) ferroelectric thin films capacitors (FECAP) with Pt-electrodes. This effec ...
The effective piezoelectric transverse coefficient e(31,f) was measured on various lead zirconate-titanate (PZT) and aluminum nitride thin films. The measurement set-up is based on the collection of the electric charges created by the forced deflection of ...
The shape of the grains and the granulometry distribution of the PZT powder are the main factor influencing the densification. In addition, we shown that a higher concentration of PZT powder in the ink with a right rheology of the ink improves the density ...
The piezoelectric properties of rhombohedral relaxor-ferroelectric compositions close to morphotropic phase boundary have been studied as a function of temperature. As they exhibit, upon heating, a rhombohedral to tetragonal phase transition the piezoelect ...
Ultrasonic motors for low electrical power applications are considered for portable devices such as an electronic wristwatch. For the study of a standing wave type motor, a modular approach was proposed, where stators and rotors are added in an assembly st ...
Two W protection schemes for direct-contact bottom electrodes for PZT thin films, namely RuO2/Cr and RuO2/Ru, were compared with respect to protective performance and contact resistance up to 800 degrees C annealing temperature in oxygen. Cr clearly offers ...