Micro-fabricated Alkali Vapor Cells for Chip Scale Atomic Clocks Sealed at Low Temperature with Thin-Film Metallic Bonding

Micro-fabriced alkali vapor cells and applications in various fields as the heart of ultraprecise sensors, like chip scale atomic clocks, magnetometers or gyroscopes. Miniaturization asks for either new fabrication techniques or new physical concepts or both. We present here a new fabrication technique for the alkali cells which allows the integration of a anti-relaxation wall coating for alkali vapor cells in order to improve the signal for miniazurized cells.