The design optimization through modeling of a thinned bulk-PZT-based vibration energy harvester on a flexible polymeric substrate is presented. We also propose a simple foil-level fabrication process for their realization, by thinning the PZT down to 50 mu m and laminating it via dry film photoresist onto a PET substrate at low temperature (
Olga Fink, Chao Hu, Sayan Ghosh