Publications related to PZT thin films for MEMS devices

Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes

Paul Muralt, Andrea Mazzalai, Nachiappan Chidambaram

Interdigitated electrode (IDE) systems with lead zirconate titanate (PZT) thin films play an increasingly important role for two reasons: first, such a configuration generates higher voltages than parallel plate capacitor-type electrode (PPE) structures, a ...

Institute of Electrical and Electronics Engineers2012

Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes

Paul Muralt, Andrea Mazzalai, Nachiappan Chidambaram

PZT thin films on insulator buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate electrode (PPE) structures, because IDE structures exploit the longitudinal piezoelectric effect, wh ...

Ieee2012

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films

Paul Muralt, Ramin Matloub Aghdam

Piezoelectric wurtzite ScxAl1-xN (x = 0, 0.1, 0.2, 0.3) thin films were epitaxially grown by reactive magnetron co-sputtering from elemental Sc and Al targets. Al2O3(0001) wafers with TiN(111) seed and electrode layers were used as substrates. X-ray diffra ...

American Institute of Physics2012

Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Robert Andrew Lockhart

This paper presents a complete wafer level microfabrication process for the production of unimorph MEMS energy harvesters based on bulk PZT. Recently, piezoelectric harvesters designed to take advantage of the high quality piezoelectric properties of bulk ...

Elsevier Science Bv2012

The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Don Isarakorn

This paper focuses on the fabrication and evaluation of vibration energy harvesting devices by utilizing an epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin film. The high quality of the c-axis oriented PZT layer results in a high piezoelectric coefficient and a low ...

2011

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications

Nico de Rooij, Danick Briand, Jinyu Jason Ruan, Pattanaphong Janphuang, Robert Andrew Lockhart, Don Isarakorn

Bulk PZT ceramics provide high electromechanical coupling (k) which is desirable for piezoelectric energy harvesters since the energy transformed from a mechanical agitation into an electrical output is proportional to k2 [1-2]. However, piezoelectric cant ...

2011

Strain-modulated piezoelectric and electrostrictive nonlinearity in ferroelectric thin films without active ferroelastic domain walls

Dragan Damjanovic

In contrast to usual assumptions, it is shown that even when ferroelastic domain walls are inactive or absent, the motion of ferroelectrically active interfaces in ferroelectric materials contributes, at subcoercive electric fields, not only to the polariz ...

American Institute of Physics2011

Epitaxial piezoelectric MEMS on silicon

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Don Isarakorn

This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...

Institute of Physics2010

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PZT thin films for MEMS devices

Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes

Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films

Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets

Epitaxial Piezoelectric MEMS on Silicon

The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications

Strain-modulated piezoelectric and electrostrictive nonlinearity in ferroelectric thin films without active ferroelastic domain walls

AIN Thin Film Structures for High-Q Resonators

Epitaxial piezoelectric MEMS on silicon

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Chat with Graph Search

Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes

Epitaxial piezoelectric MEMS on silicon

The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films

AIN Thin Film Structures for High-Q Resonators

Strain-modulated piezoelectric and electrostrictive nonlinearity in ferroelectric thin films without active ferroelastic domain walls

Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes

Epitaxial Piezoelectric MEMS on Silicon

Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications