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A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon

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A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon

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A 6.7 MHz Nanoelectromechanical Ring Oscillator Using Curved Cantilever Switches Coated with Amorphous Carbon

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