Publication

Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time

Niels Quack
2014
Conference paper

Abstract

We report on 50x50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1x2 waveguide switches have been integrated on 9mmx9mm chips

Official source

https://infoscience.epfl.ch/record/209914?ln=en

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