Publication

Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers

Yves Bellouard, Tao Yang
2013
Conference paper

Abstract

Non-linear laser-matter interaction offers the possibility to structure transparent material in three dimensions. Here, we demonstrate that such process can be implemented for fabricating novel type of microsystems, including actuators transparent to visible light.

Official source

https://infoscience.epfl.ch/record/210118?ln=en

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Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers

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On the interaction of femtosecond laser pulses with layered dielectric materials

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