This paper presents a mesa-scale low-temperature co-fired ceramic (LTCC) hotplate system. Using embedded thick-film platinum heaters, the hotplate has been able to operate at about 600 degrees C in a reliable manner, while its operating temperature can be regulated using an automation setup. The capability of structuring in LTCC materials made it possible to create an efficient thermal decoupling to have two temperature zones in the device, an active heating area and a cold-zone (
Lyesse Laloui, Elena Ravera, Sofie Elaine ten Bosch
François Maréchal, Luc Girardin, Ana Catarina Gouveia Braz, Bingqian Liu, Raphaël Briguet
Marcel Drabbels, Constantin Richard Krüger, Nathan Junior Mowry