Nico de Rooij, Caglar Ataman, Wilfried Noell, Sébastien Lani, Dara Zaman Bayat, Benedikt Guldimann
We report on the advances towards the design and fabrication of a system consisting or two 10mm mirrors, one actuated magnetically and the other electrostatically. The system will be used for beam steering. The maximum resonant frequencies and deflection a ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011